Nanocalorimetric devices with thermoelectric PECVD p-Si1-xGex thin film layers for the analysis of biological phase transitions

M. Jaegle, Ch. Künzel, M .Benkendorf, U. Vetter, P. Auer, A. Lambrecht, H. Böttner

Fraunhofer-Institut für Physikalische Messtechnik (IPM), Heidenhofstraße 8, D-79110 Freiburg, Germany

In order to realise thermoelectric devices for sensors, coolers, and energy conversion systems the technology of thin film thermoelectric materials has to be developed. We present our progress in the development and application of thin PECVD-films of the widely used thermoelectric material Si1-xGex. We report on the development and the properties of high quality boron doped p-Si1-xGex PECVD-layers with power factors up to 12 w/cmK2. Using these layers a concept was developed and a technology of a MEMS related calorimetric device for biotechnological applications was realised. We report on the properties of first calorimeters. Calorimetric data will be given using the phase transition of DMPC-lipid membranes diluted in aqueous solution. DMPC (Dimyristoylphosphatidylchlorin) is a biological test compound.

This work was supported by BMBF grant no. 03N1050E/9 and grant no. 13N8161.